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Mechanical design issues in laterally-driven microstructures

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Mechanical design issues in laterally

The mechanical issues influencing the design and performance of laterally-driven resonant-structure micromechanical systems are identified and quantified. Two forms of resonant-structure suspensions are presented and the performance of each …
https://www.sciencedirect.com/science/article/pii/0924424790870892

DSpace at KOASAS: Mechanical

Mechanical Design Issues in Laterally-Driven Microstructures Pisano, AP / Cho, Young-Ho researcher. Issue Date 1989-06 Language ENG Citation.
http://koasas.kaist.ac.kr/handle/10203/114552

Proc IMechE Part N: Slide film damping in ...

Weidong Wang, School of Electrical and Mechanical Engineering, Xidian University, ... dation for the analysis and design of laterally driven microstructures.
http://journals.sagepub.com/doi/pdf/10.1177/1740349913486097

Design, Fabrication, Static Test and …

Design, Fabrication, Static Test and Uncertainty Analysis of a Resonant Microaccelerometer Using Laterally-driven Electrostatic Microactuator - Resonant ...
http://www.koreascience.or.kr/article/ArticleFullRecord.jsp?cn=DHGGCI...

Laterally Driven Polysilicon Resonant

Laterally Driven Polysilicon ... since this results Mechanical vibration of microstructures can be ... , outlined some of the design issues of the ...
http://www.academia.edu/5548072/Laterally_Driven_Polysilicon_Resonant...

Comb-drive actuators for large …

The design, fabrication and experimental results of lateral-comb-drive actuators for large displacements at low driving voltages is presented. A comparison of several suspension designs is given, and the lateral large deflection behaviour of clamped - clamped beams and a folded flexure design is modelled.
http://iopscience.iop.org/article/10.1088/0960-1317/6/3/004/meta

Laterally Driven Polysilicon Resonant

3. Resonant Structure Design We now consider the mechanical design of two classes of lateral resonant structures, which demonstrate the power and flexibility of the lateral drive approach: linear resonant plates with folded supporting beams and torsional resonant plates with differential drive and sense ports. 27 3.1.
https://www.sciencedirect.com/science/article/pii/0250687489870982

Mechanical design issues in laterally

The mechanical issues influencing the design and performance of laterally-driven resonant-structure micromechanical systems are identified and quantified ...
https://www.researchgate.net/publication/223485485_Mechanical...

Laterally Driven Polysilicon Resonant Microstructures

Laterally Driven Polysilicon Resonant Microstructures ... Mechanical vibration of microstructures can ... We now consider the mechanical design of ...
http://www.me.berkeley.edu/~lwlin/me119/papers/paper2.pdf

W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...

Laterally Driven Polysilicon Resonant Microstructures ... Mechanical vibration of microstructures can be ... We now consider the mechanical design of two ...
https://robotics.eecs.berkeley.edu/~pister/147fa15/Resources/Tang...