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Mechanical design issues in laterally-driven microstructures

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Mechanical design issues in laterally

The mechanical issues influencing the design and performance of laterally-driven resonant-structure micromechanical systems are identified and quantified. Two forms of resonant-structure suspensions are presented and the performance of each …
https://www.sciencedirect.com/science/article/pii/0924424790870892

Laterally Driven Polysilicon Resonant Microstructures

Laterally Driven Polysilicon Resonant Microstructures ... Mechanical vibration of microstructures can ... We now consider the mechanical design of ...
http://www.me.berkeley.edu/~lwlin/me119/papers/paper2.pdf

Fabrication of laterally driven bulk titanium devices on ...

microstructures were demonstrated by face-to-face bonding a structured titanium substrate to a glass substrate, followed by chemical mechanical polishing and dry releasing [14]. However, the titanium structures had to be refilled prior to bonding, putting a serious limitation on the layout design.
http://iopscience.iop.org/article/10.1088/0960-1317/23/7/075026/pdf

Impact, Friction, and Wear Testing of …

This sequence generates normal impact and tangential friction contact between the two microstructures, ... Mechanical Design Issues in Laterally-driven ...
https://www.cambridge.org/core/journals/mrs-online-proceedings...

A study on the thermal behavior in …

Single crystal silicon (SCS) is used in a variety of microsensor applications in which stresses and other mechanical effects may dominate device ...
https://rd.springer.com/content/pdf/10.1007/BF02942586.pdf

DSpace at KOASAS: Mechanical

Mechanical Design Issues in Laterally-Driven Microstructures Cited 0 time in Cited 0 time in . Hit : 186; Download : 0; Export. DC(XML) Excel.
http://koasas.kaist.ac.kr/handle/10203/114552

Laterally Driven Polysilicon Resonant …

Laterally Driven Polysilicon Resonant Microstructures. Home; Documents; Laterally Driven Polysilicon Resonant Microstructures; Please download to view
https://vdocuments.site/documents/laterally-driven-polysilicon...

Mechanical design issues in laterally

Download Citation on ResearchGate | Mechanical design issues in laterally-driven microstructures | The mechanical issues influencing the design and ...
https://www.researchgate.net/publication/223485485_Mechanical...

Laterally Driven Polysilicon Resonant

3. Resonant Structure Design We now consider the mechanical design of two classes of lateral resonant structures, which demonstrate the power and flexibility of the lateral drive approach: linear resonant plates with folded supporting beams and torsional resonant plates with differential drive and sense ports. 27 3.1.
https://www.sciencedirect.com/science/article/pii/0250687489870982

Laterally Driven Polysilicon Resonant

Laterally Driven Polysilicon ... since this results Mechanical vibration of microstructures can be ... , outlined some of the design issues of the ...
http://www.academia.edu/5548072/Laterally_Driven_Polysilicon_Resonant...